Zeiss Gemini 500
Cryo-field emission-variable pressure SEM (cryo-FE-VPSEM) of the latest generation equipped with the full cryogenic system manufactured by Leica, and allowing for low-temperature observations down to -150°C. The equipment includes in-lens SE and BSE detectors for high-resolution (<0.8 nm) low voltage (<100 V) surface and compositional imaging, and side-mounted detectors for SE, low-vacuum SE, BSE and STEM (BF, DF, and HAADF) imaging. The instrumentation is complemented by the 150 mm2 SDD-EDX X-Max detector released by Oxford Instruments.
The cryo-FE-VPSEM Zeiss Gemini 500 is currently being installed and should be available for booking starting in mid-January 2018.
Tescan Mira II LMU
Field emission (Shottky-FE) SEM equipped with SE, in-lens SE and BSE detectors. EDX and EBSD analyses are performed using a Penta-FET 3x detector and a Nordlys S camera, respectively, both being monitored by the AZtec 2.4 software package released by Oxford Instruments. This instrument also allows for low-vacuum BSE observations up to 50 Pa.
SEM equipped with a standard thermionic source (W filament). The instrument is used for everyday SE, low-vaccum SE and BSE imaging, as well as for panchromatic cathodoluminescence (pan-CL) imaging. The instrumentation also includes a Penta-FET EDX detector released by Oxford Instruments, and the SEM microtomographic equipment (SEM micro-CT) manufactured by Bruker for 3D volumetric analyses.